There was once a technology development which many people thought an inevitability.
TSMC said it would have the technology in trial production in 2013-4 and in volume in 2015.
Nikon said it would have a litho tool by 2013 and be in volume production of it in 2015.
Investors put $5.5 billion into ASML to fund the development of a suitable scanner.
The Governor of New York said that investors Intel, IBM, GloFo, TSMC and Samsung, would invest $4.8 billion in a fab using the technology.
Imec built a cleanroom to prototype the technology.
But it didn’t happen.
Source: electronicsweekly
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